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SCHNEEBERGER develops positioning systems for use in wafer production. Because of very demanding customer requirements, SCHNEEBERGER has developed a range of solutions with CFRP components. One example is the new double gantry system. Highlights include the axle arrangement and the use of composite materials. As a result, the positioning speed is doubled as compared to that of previous systems.
CFRP in use in highly-dynamic precision axes
The chip manufacturing occurs via a lithographic layer structure on a silicon wafer in the cleanroom.
In order to ensure quality, critical dimensions are regularly tested in the manufacturing process (wafer metrology). These measurements test dimensions <20 nm.
In this process, the wafer is moved to below the measuring instrument by means of a positioning system. The development and production of this positioning system is the task of the Business Unit Systems.
Systems movie
Our customers' requirements:
Reliable and precise products.
Our solution:
tailored systems, from single axes with integral control units through to highly complex machines.
SCHNEEBERGER overview linear bearings and positioning systems
Article/Example of application
High velocity
Thanks to its high-performance positioning and movement systems, Schneeberger is one of the leading companies in the industry. Download now
Press releases
New positioning system doubles positioning speed for 450 mm
Revolutionary double gantry from Schneeberger. Known for innovation, Swiss firm Schneeberger AG Lineartechnik is currently developing a new positioning system that will bear the name Double Gantry. Download now
SCHNEEBERGER Positioning Systems
Customer-specific positioning systems with a high degree of purity. Positioning systems used in particularly demanding branches of industry. Download now
SCHNEEBERGER Positioning Systems - in different industries
In semiconductor, medical engineering, and solar technology must guarantee the highest level of precision and reliability whilst at the same time maintaining an extremely high degree of purity. Download now
Advantages of CFRP components
- 30% reduction of the moving mass
- Specific rigidity of the components increased by a factor of 2.5
- 40% higher 1. Natural frequency of the system
- 30% less M&S (move & settle) time
- Required component tolerances maintained (e.g., parallelism)
- System specifications can be safely observed (e.g., drift)
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Roggwil (Switzerland):
Head office of the company SCHNEEBERGER
business unit headquarters
